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| Author | BSI |
|---|---|
| Published by | BSI |
| Document type | Standard |
| Format | File |
| EAN ISBN | 0 580 44610 7 |
| ICS | 13.040.35 : Cleanrooms and associated controlled environments |
| Number of pages | 64 |
| Cross references | ISO 14644-7:2004 EN ISO 14644-7:2004 |
| Year | 2004 |
| Country | United Kingdom |