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| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2014-10-20 |
| ICS | 23.160 : Vacuum technology |
| Number of pages | 19 |
| Year | 1990 |
| Document history | |
| Country | Japan |
| Keyword | JIS 8751;8751;JIS Z 8751-1994 |