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ASTM F1711-96(2016)
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe MethodMore info
1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates, used in making flat panel information displays. It is assumed that the thickness of the conductive thin film is much thinner than the spacing of the contact probes used to measure the sheet resistance.
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| Confirmation date | 2016-05-01 |
| ICS | 31.120 : Electronic display devices |
| Number of pages | 9 |
| Replace | ASTM F1711-96(2008) |
| Set | ASTMVOL1004 |
| Year | 1990 |
| Document history | ASTM F1711-96(2008) |
| Country | USA |
| Keyword | ASTM 1711;ASTM F1711;ASTM F1711;10.1520/F1711-96R16 |