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ASTM F1709-97(2016)
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film ApplicationsMore info
1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| Confirmation date | 2016-05-01 |
| ICS | 31.120 : Electronic display devices |
| Number of pages | 3 |
| Replace | ASTM F1709-97(2008) |
| Set | ASTMVOL1004 |
| Year | 1990 |
| Document history | ASTM F1709-97(2008) |
| Country | USA |
| Keyword | ASTM 1709;ASTM F1709;ASTM F1709;10.1520/F1709-97R16 |