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ASTM F1367-98(2011)
Standard Specification for Chromium Sputtering Targets for Thin Film ApplicationsMore info
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
Rationale:
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| Confirmation date | 2011-06-01 |
| ICS | 25.220.40 : Metallic coatings |
| Number of pages | 2 |
| Replace | ASTM F1367-98(2003) |
| Set | ASTMVOL1004 |
| Year | 1990 |
| Document history | ASTM F1367-98(2003) |
| Country | USA |
| Keyword | ASTM 1367;ASTM F1367;ASTM F1367;10.1520/F1367-98R11 |