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ASTM F24-09(2015)

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ASTM F24-09(2015)

Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces

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1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.

Author ASTM
Editor ASTM
Document type Standard
Format File
Confirmation date 2015-10-01
ICS 17.040.20 : Properties of surfaces
Number of pages 4
Replace ASTM F24-09
Set ASTMVOL1503
Year 2009
Document history ASTM F24-09
Country USA
Keyword ASTM 24;ASTM F24;ASTM F24;10.1520/F0024-09R15