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ASTM E2734/E2734M-10(2018)
Standard Specification for Dimensions of Knife-Edge FlangesMore info
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| Confirmation date | 2018-06-01 |
| ICS | 23.160 : Vacuum technology |
| Number of pages | 4 |
| Replace | ASTM E2734/E2734M-10 |
| Set | ASTMVOL0306 |
| Year | 2010 |
| Document history | ASTM E2734/E2734M-10 |
| Country | USA |
| Keyword | ASTM 2734;ASTM E2734;ASTM E2734;10.1520/E2734_E2734M-10R18 |