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ASTM D5544-16 + Redline
Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity WaterMore info
1.1 This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| ICS | 71.040.40 : Chemical analysis |
| Number of pages | 9 |
| Replace | ASTM D5544-11 + Redline |
| Set | ASTMVOL1101 |
| Year | 2016 |
| Document history | ASTM D5544-11 + Redline |
| Country | USA |
| Keyword | ASTM 5544;ASTM D5544;ASTM D5544;10.1520/D5544-16 |