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BS ISO 12406:2010

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BS ISO 12406:2010

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon

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Author BSI
Editor BSI
Document type Standard
Format File
Confirmation date 2016-08-01
EAN ISBN 978 0 580 66874 6
ICS 71.040.40 : Chemical analysis
Number of pages 24
Cross references ISO 12406:2010
Set MYSTD-20STD
Year 2010
Country United Kingdom
Keyword BS ISO 12406 ; BSISO12406 ; BSISO 12406 ; BS ISO12406