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BS ISO 14706:2014
Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopyMore info
| Author | BSI |
|---|---|
| Editor | BSI |
| Document type | Standard |
| Format | File |
| EAN ISBN | 978 0 580 82725 9 |
| ICS | 71.040.40 : Chemical analysis |
| Number of pages | 36 |
| Replace | BS ISO 14706:2000 |
| Cross references | ISO 14706:2014 |
| Set | MYSTD-20STD |
| Year | 2014 |
| Country | United Kingdom |
| Keyword | BS ISO 14706 ; BSISO14706 ; BSISO 14706 ; BS ISO14706 |