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ISO 14644-5:2004 (R2018)

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ISO 14644-5:2004 (R2018)

Cleanrooms and associated controlled environments — Part 5: Operations

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Author ISO/TC 209 Cleanrooms and associated controlled environments
Editor ISO
Document type Standard
Format Paper
Confirmation date 2018-10-25
Edition 1
ICS 13.040.35 : Cleanrooms and associated controlled environments
Number of pages 44
Weight(kg.) 0.1748
Year 2004
Country Switzerland