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ISO 23812:2009 (R2014)

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ISO 23812:2009 (R2014)

Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth calibration for silicon using multiple delta-layer reference materials

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Author ISO/TC 201/SC 6 Secondary ion mass spectrometry
Editor ISO
Document type Standard
Format Paper
Confirmation date 2014-09-19
Edition 1
ICS 71.040.40 : Chemical analysis
Number of pages 19
Weight(kg.) 0.1323
Year 2009
Country Switzerland