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ISO 12406:2010 (R2016)
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth profiling of arsenic in siliconMore info
| Author | ISO/TC 201/SC 6 Secondary ion mass spectrometry |
|---|---|
| Editor | ISO |
| Document type | Standard |
| Format | Paper |
| Confirmation date | 2016-06-17 |
| Edition | 1 |
| ICS | 71.040.40 : Chemical analysis |
| Number of pages | 13 |
| Weight(kg.) | 0.1221 |
| Year | 2010 |
| Country | Switzerland |