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ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 µm to 2,5 µm.
| Author | ISO/TC 206 Fine ceramics |
|---|---|
| Editor | ISO |
| Document type | Standard |
| Format | Paper |
| Edition | 1 |
| ICS | 81.060.30 : Advanced ceramics |
| Number of pages | 24 |
| Weight(kg.) | 0.1408 |
| Year | 2017 |
| Country | Switzerland |