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ISO 19606:2017

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ISO 19606:2017

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

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ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 µm to 2,5 µm.

Author ISO/TC 206 Fine ceramics
Editor ISO
Document type Standard
Format Paper
Edition 1
ICS 81.060.30 : Advanced ceramics
Number of pages 24
Weight(kg.) 0.1408
Year 2017
Country Switzerland