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ISO 29301:2017

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ISO 29301:2017

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

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ISO 29301:2017 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

Author ISO/TC 202/SC 3 Analytical electron microscopy
Editor ISO
Document type Standard
Format Paper
Edition 2
ICS 37.020 : Optical equipment
Number of pages 44
Replace ISO 29301:2010
Weight(kg.) 0.1748
Year 2017
Country Switzerland