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IEC 62047-21 (2014-06)
IEC 62047-21:2014 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materialsMore info
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
| Author | International Electrotechnical Commission (IEC) |
|---|---|
| Editor | CEI |
| Document type | Standard |
| Format | File |
| Edition | 1.0 |
| ICS | 31.080.99 : Other semiconductor devices |
| Number of pages | 26 |
| Replace | IEC 47F/185/FDIS (2014-03) |
| Cross references | DIN EN 62047-21 (2015-04), IDT |
| Year | 2014 |
| Document history | IEC 62047-21 (2014-06) |
| Country | Switzerland |
| Keyword | IEC62047;IEC 62047-21:2014 |