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IEC 62047-30 (2017-09)

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IEC 62047-30 (2017-09)

IEC 62047-30:2017 Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process

Author IEC
Editor CEI
Document type Standard
Format File
Edition 1.0
ICS 31.080.99 : Other semiconductor devices
31.140 : Piezoelectric devices
Number of pages 20
Year 2017
Country International
Keyword IEC62047;IEC 62047-30:2017