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IEC 63068-1 (2019-01)

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IEC 63068-1 (2019-01)

IEC 63068-1:2019 Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 1: Classification of defects

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IEC 63068-1:2019(E) gives a classification of defects in as-grown 4H-SiC (Silicon Carbide) epitaxial layers. The defects are classified on the basis of their crystallographic structures and recognized by non-destructive detection methods including bright-field OM (optical microscopy), PL (photoluminescence), and XRT (X-ray topography) images.
 

Author IEC
Editor CEI
Document type Standard
Format File
Edition 1.0
ICS 31.080.99 : Other semiconductor devices
Number of pages 23
Year 2019
Country International
Keyword IEC63068;IEC 63068-1:2019