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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
Author | IEC |
---|---|
Editor | CEI |
Document type | Standard |
Format | File |
Edition | 1.0 |
ICS | 31.080.99 : Other semiconductor devices 31.140 : Piezoelectric devices |
Number of pages | 16 |
Year | 2019 |
Country | International |
Keyword | IEC62047;IEC 62047-34:2019 |