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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
| Author | IEC |
|---|---|
| Editor | CEI |
| Document type | Standard |
| Format | File |
| Edition | 1.0 |
| ICS | 31.080.99 : Other semiconductor devices 31.140 : Piezoelectric devices |
| Number of pages | 16 |
| Year | 2019 |
| Country | International |
| Keyword | IEC62047;IEC 62047-34:2019 |