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IEC 62047-34 (2019-04)

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IEC 62047-34 (2019-04)

IEC 62047-34:2019 Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

Author IEC
Editor CEI
Document type Standard
Format File
Edition 1.0
ICS 31.080.99 : Other semiconductor devices
31.140 : Piezoelectric devices
Number of pages 16
Year 2019
Country International
Keyword IEC62047;IEC 62047-34:2019