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SPC GB/T 26113-2010
M00000940
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SPC GB/T 26113-2010 Micro-Electromechanical System Technology -- General Rules For The Assessment Of Micro-Geometrical Parameters
standard by Standards Press of China, 01/10/2011
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Please note: This publication has been translated into English and may contain some spelling, grammatical, and other minor editorial errors.SPC GB/T 26113-2010 specifies the general rules for assessment of the micro-geometrical parameters of MEMS products. The general rules include the basic assessment principles, the assessment features, the assessment procedure, the assessment methods, and the assessment rules.