Full Description

This standard is the basis for FM Approvals Assessment of manufactoring equipment (i.e. Tools) used by the Semiconductor Industyr in semiconductor cleanroom manufacturing occupancies where the processing of smeiconductor components, such as microprocessors, memory compnents, etc., takes place

Product Details

Published: 12/01/2005 Number of Pages: 22 File Size: 1 file , 130 KB