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New CGA G-14 View larger

CGA G-14

M00000083

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CGA G-14 Code of Practice for Nitrogen Trifluoride (EIGA Doc. 92/03)

standard by Compressed Gas Association, 11/14/2003

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Nitrogen trifluoride is an oxidizing compressed gas that has gained acceptance in a number of applications as a fluorinating agent. It is this property that makes it valuable as a nonreactive source of fluorine for etching and cleaning applications.