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| Author | BSI |
|---|---|
| Published by | BSI |
| Document type | Standard |
| Format | File |
| EAN ISBN | 978 0 580 85502 3 |
| ICS | 13.040.35 : Cleanrooms and associated controlled environments |
| Number of pages | 30 |
| Cross references | ISO 14644-15:2017 |
| Set | MYSTD-20STD |
| Year | 2018 |
| Country | UK |