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BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods partTitleEN sectionTitleENMore info
| Author | BSI |
|---|---|
| Editor | BSI |
| Document type | Draft |
| Format | File |
| ICS | 71.040.40 : Chemical analysis |
| Number of pages | 58 |
| Cross references | ISO/DIS 18516 |
| Year | 2015 |
| Country | United Kingdom |