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16/30348371 DC

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16/30348371 DC

BS ISO 14644-12. Cleanrooms and associated controlled environments. Part 12. Specifications for monitoring air cleanliness by nanoscale particle concentration partTitleEN sectionTitleEN

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Author BSI
Editor BSI
Document type Draft
Format File
ICS 13.040.35 : Cleanrooms and associated controlled environments
Number of pages 21
Cross references ISO/DIS 14644-12
Year 2016
Country United Kingdom