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BS ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipmentMore info
| Author | BSI |
|---|---|
| Editor | BSI |
| Document type | Standard |
| Format | File |
| EAN ISBN | 978 0 580 96201 1 |
| ICS | 81.060.30 : Advanced ceramics |
| Number of pages | 12 |
| Cross references | ISO 21859 |
| Year | 2019 |
| Country | United Kingdom |