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IEC 62047-1 (2016-01)
IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitionsMore info
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
| Author | IEC |
|---|---|
| Editor | CEI |
| Document type | Standard |
| Format | File |
| Edition | 2.0 |
| ICS | 31.080.99 : Other semiconductor devices |
| Number of pages | 66 |
| Replace | IEC 62047-1 (2005-09) |
| Cross references | DIN EN 62047-1 (2016-12), IDT |
| Year | 2016 |
| Document history | IEC 62047-1 (2016-01) IEC 47F/232/FDIS (2015-09) |
| Country | Switzerland |
| Keyword | IEC62047;IEC 62047-1:2016 |