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IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in accordance with IEC Guide 108:2006. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
Author | IEC |
---|---|
Editor | CEI |
Document type | Standard |
Format | File |
Edition | 1.0 |
ICS | 01.040.29 : Electrical engineering (Vocabularies) 31.080.99 : Other semiconductor devices |
Number of pages | 47 |
Year | 2018 |
Country | Switzerland |
Keyword | IEC60050;IEC 60050-523:2018 |