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IEC 60050-523 (2018-12)

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IEC 60050-523 (2018-12)

IEC 60050-523:2018 International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices

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IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in accordance with IEC Guide 108:2006. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.

Author IEC
Editor CEI
Document type Standard
Format File
Edition 1.0
ICS 01.040.29 : Electrical engineering (Vocabularies)
31.080.99 : Other semiconductor devices
Number of pages 47
Year 2018
Country Switzerland
Keyword IEC60050;IEC 60050-523:2018