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IEC 62047-32 (2019-01)
IEC 62047-32:2019 Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonatorsMore info
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
| Author | IEC |
|---|---|
| Editor | CEI |
| Document type | Standard |
| Format | File |
| Edition | 1.0 |
| ICS | 31.080.99 : Other semiconductor devices |
| Number of pages | 37 |
| Year | 2019 |
| Country | Switzerland |
| Keyword | IEC62047;IEC 62047-32:2019 |