IEST RP-CC026.2 presents guidelines for maintaining cleanroom integrity at all times, including during routine maintenance, modifications, and equipment replacement. The document provides a basis for preparing standard operating procedures for any cleanroom. It also outlines test procedures for verifying cleanliness of cleanroom apparatus and surfaces.
Product Details
Published: 09/01/2004 ISBN(s): 9781877862977 Number of Pages: 24 File Size: 1 file , 1.1 MB