Full Description

IEST RP-CC042.1 addresses the sizing and counting of submicrometer liquid-borne particles using optical discrete-partical counters with a focus on applications in the semiconductor, flat-panel display, and data storage industries. Liquid-borne particle measurement involves many technical challenges that can substantially affect results in both sizing and counting of particles. This RP is intended as a single source covering those challenges and solutions and provides a handy reference for professionals in this field.

Product Details

Published: 10/01/2011 ISBN(s): 9780915414475, 9780915414093 Number of Pages: 32 File Size: 1 file , 1.2 MB